ITO残留相关论文
铟锡氧化物(indium tin oxide,ITO)作为氢化非晶硅薄膜晶体管液晶显示器(hydrogenatedamorphous silicon thin film transistor-li......
期刊
铟锡氧化物(indium tin oxide,ITO)作为氢化非晶硅薄膜晶体管液晶显示器(hydrogenatedamorphous silicon thin film transistor-li......
期刊
摘 要：研究了单层多点TP产品工艺中ITO残留问题的解决方法。在现有清洗→成膜→图形→刻蚀→剥离→退火这一系列工艺流程的基础上增......
铟锡氧化物(indiumtinoxide,ITO)作为氢化非晶硅薄膜晶体管液晶显示器(hydrogenated amorphous silicon thin film transistor-liq......
期刊
