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[期刊论文] 作者：Jun-Wu Wang,Xin-Bing Wang,Du-Luo Zuo,Vassily S.Zakharov,
来源：中国物理B（英文版） 年份：2021
Extreme ultraviolet (EUV) source produced by laser-induced discharge plasma (LDP) is a potential technical means in inspection and metrology.A pulsed Nd:YAG laser is focused on a tin plate to produce an initial plasma thereby triggering a d......
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