【摘 要】
：
Extreme ultraviolet (EUV) source produced by laser-induced discharge plasma (LDP) is a potential technical means in inspection and metrology.A pulsed Nd:YAG laser is focused on a tin plate to produce an initial plasma thereby triggering a discharge betwee
【机 构】
：
Wuhan National Research Center for Optoelectronics,Huazhong University of Science and Technology,Wuh
论文部分内容阅读
Extreme ultraviolet (EUV) source produced by laser-induced discharge plasma (LDP) is a potential technical means in inspection and metrology.A pulsed Nd:YAG laser is focused on a tin plate to produce an initial plasma thereby triggering a discharge between high-voltage electrodes in a vacuum system.The process of micro-pinch formation during the current rising is recorded by a time-resolved intensified charge couple device camera.The evolution of electron temperature and density of LDP are obtained by optical emission spectrometry.An extreme ultraviolet spectrometer is built up to investigate the EUV spectrum of Sn LDP at 13.5 nm.The laser and discharge parameters such as laser energy,voltage,gap distance,and anode shape can influence the EUV emission.
其他文献
A high efficiency compact Yb∶KGW regenerative amplifier using an all-fiber laser seed source was comprehensively studied.With thermal lensing effect compensated by the cavity design,the compressed pulses with energy of 1 rrJ at 1 kHz and 0.4 mJ at 10 kHz
Directly resolving structural changes in material on the atomic scales of time and space is desired in studies of many disciplines.Ultrafast electron diffraction (UED),which combines the temporal resolution of femtosecond-pulse laser and the spatial sensi
We report a novel method to prepare a mixture of 40K Fermi gas having an equal population of the two ground magnetic spin states confined in an optical dipole trap,in the presence of an noisy quantization (magnetic) field.We realize the equal population m
To identify the unstable individuals of networks is of great importance for information mining and security manage-ment.Exploring a broad range of steady-state dynamical processes including biochemical dynamics,epidemic processes,birth-teath processes and
We report a GaSb-based type-Ⅰ quantum well cascade diode laser emitting at nearly 2-μm wavelength.The recycling of carriers is realized by the gradient A1GaAsSb barrier and chirped GaSb/A1Sb/InAs electron injector.The growth of quaternary digital alloy wi
High-voltage transmission line possesses a typical suspended cable structure that produces ice in harsh weather.More-over,transversely galloping will be excited due to the irregular structure resulting from the alternation of lift force and drag force.In
We investigate the properties of a generalized Rabi model by replacing the two-level atom in Rabi model with a ferromagnetic Heisenberg spin chain.We find that the dynamical behavior of the system can be divided into four categories.The energy spectrum of
Impacts of microenvironments on cell migration have been reported in various interaction modes.A rapid tumor metastasis occurs along topological interfaces in vivo,such as the interface between the blood vessels and nerves.In this work,we culture MDA-MB23
Compensated ferrimagnetic insulators are particularly interesting for enabling functional spintronic,optical,and mi-crowave devices.Among many different garnets,Gd3FesO12 (GdIG) is a representative compensated ferrimagnetic insu-lator.In this paper,we wil
Ni-Zn ferrite and Bi2O3 composites were developed by the sol-gel method.The structural,magnetic,and dielectric properties were studied for all the prepared samples.X-ray diffraction (XRD) was performed to study the crystal structure.The results of field e