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[期刊论文] 作者：Wang Lian,Song Chong-Fu,Sun Jian-Qiu,Hou Ying,Li Xiao-Guang,Li Quan-Xin,
来源：中国物理B(英文版) 年份：2008
The surface oxidation of silicon (Si) wafers by atomic oxygen radical anions (O- anions) and the preparation of metal-oxide-semiconductor (MOS) capacitors on th...
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