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本文选择配备氦离子化检测器的气相色谱分析高纯WF6(99.999%)中微量气体杂质。设计了一套双通道反吹气路,采用十通阀切换实现了六氟化钨与气相轻组分分离后的反吹,避免了六氟化钨对分析柱及检测器的腐蚀。通过实验选择最佳的色谱参数条件及反吹时间,分别采用不同的气路系统实现了WF6中的微量CF4、CO2、SF6及O2+Ar、N2、CO的分离分析。
In this paper, gas chromatography with helium ionization detector was selected to analyze trace gas impurities in high purity WF6 (99.999%). A dual-channel backflushing gas circuit was designed. With the ten-way valve switching, backflushing of the tungsten hexafluoride and gas phase light components was avoided, which avoided the corrosion of the analytical column and the detector. By choosing the best chromatographic parameter conditions and backflushing time experimentally, the separation and analysis of trace amounts of CF4, CO2, SF6 and O2 + Ar, N2 and CO in WF6 were achieved by using different gas circuit systems.