近代高精度光学角度传感器采用增量式的日益增多,其主要元件为光栅盘。为了提高测量精度,消除轴系偏心误差,光学角度传感器过去常采用对边成象方法(如图1)。由于成象要求清晰,光栅条纹又密,一般在25～100对/毫米之间,所以对成象光学系统质量要求很高,一般相对孔径都在 F/4以上,轴上轴外的象差均小于0.01毫米。为了 Modern high-precision optical angle sensor with increasing incremental, the main components for the grating disk. In order to improve the measurement accuracy and eliminate the eccentricity error of the shaft system, the optical angle sensor used the opposite-side imaging method (Figure 1). As the imaging requirements are clear, grating stripes and dense, usually between 25 to 100 pairs / mm, so the quality of the imaging optical system is very high, the general relative aperture in the F / 4 or more, off-axis axis aberration Less than 0.01 mm. in order to