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基于非均匀膜理论提出的折射率分层模型,将非均匀膜层分为N个均匀子层,应用光学薄膜特征矩阵对其进行理论分析。应用膜系设计软件模拟ZrO2和CeO2的负非均匀性对增透膜光谱特性的影响。研究结果表明:负非均匀性使多层增透膜的反射率增大,在参考波长处的光谱特性变差,使整个反射光谱曲线朝长波方向漂移,从而导致整个膜系的光谱特性偏离理想情形。
Based on the refractive index hierarchical model proposed by the non-uniform film theory, the non-uniform film is divided into N uniform sub-layers, and the theoretical analysis of the film is performed using the optical film feature matrix. Effect of Negative Heterogeneity of ZrO2 and CeO2 on Spectral Properties of AR Coatings Using Film Design Software. The results show that the negative nonuniformity increases the reflectivity of multilayer AR coatings and deteriorates the spectral characteristics at the reference wavelength, which shifts the entire reflection spectrum curve to the long wave direction, resulting in the deviation of the spectral characteristics of the entire film system from the ideal situation.