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双光束双波长激光干涉(DDI)法采用自行设计的可调双波长氦氖激光器作光源,可在同一光路中通过两次测量获得薄膜样品两个波长(0.633μm,3.39μm)下的光学常数,即折射率、消光系数和厚度。论述了测量原理、测量装置和测量结果。
Double-beam dual-wavelength laser interferometry (DDI) method using a self-designed tunable dual-wavelength He-Ne laser as a light source, can be obtained in the same optical path through two measurements at two wavelengths (0.633μm, 3.39μm) Optical constants, ie refractive index, extinction coefficient and thickness. The measurement principle, measuring device and measurement results are discussed.