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给出了射频板条CO2激光器α型放电集总参数等效电路模型.计算了谐振放电状态下集总参数电路方程,得到了沿激光器电极长度方向上的电压幅度和相位的分布.沿电极最小的相对电压幅度起伏约为1.27%.由模型推导出用宏观测量参数表示的RLP和E/Pgas的计算公式,不同于RalfMalz的结果.建立了射频板条CO2激光器的实验装置,获得了均匀射频放电和CO2激光.
The equivalent circuit model of α-type discharge lumped parameter of RF slab CO2 laser is given. The lumped parameter circuit equation is calculated under the condition of resonant discharge, and the distribution of voltage amplitude and phase along the length of the laser electrode is obtained. The minimum relative voltage amplitude along the electrode is about 1.27%. Derived from the model, the formulas for calculating RLP and E / Pgas expressed in macroscopic measurement parameters are different from the results of RalfMalz. The experimental setup of the RF slab CO2 laser was established, and the uniform RF discharge and CO2 laser were obtained.