金刚石薄膜是当今世界范围研究的热点之一,其之所以引起各国(尤其是日本和美国)的高度重视和研究开发,是因为金刚石薄膜在机械加工、光学和微电子技术等领域里具有许多显著的应用效果和潜在的使用价值。 金刚石薄膜在作为涂覆工具加工过程中,涂层润滑性好,所产生的切削阻力小,磨损较慢,工具使用寿命长,同时不会引起工件的热变形,因此,金刚石薄膜作为一种工具涂覆材料将具有很好的应用前景。 Diamond thin films are one of the hot topics in the world today. The reason why diamond thin films have attracted great attention and research and development in various countries (especially Japan and the United States) is that diamond thin films have many remarkable features in the field of mechanical processing, optics and microelectronics The application effect and potential use value. Diamond film coating process as a tool, the coating lubrication is good, the resulting cutting resistance, wear slower, long tool life, without causing thermal deformation of the workpiece, therefore, the diamond film as a tool Coating material will have a good application prospects.