,High-throughput fabrication and semi-automated characterization of oxide thin film transistors

来源 :中国物理B(英文版) | 被引量 : 0次 | 上传用户:wodexuehao
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
High throughput experimental methods are known to accelerate the rate of research, development, and deployment of electronic materials. For example, thin films with lateral gradients in composition, thickness, or other parameters have been used alongside spatially-resolved characterization to assess how various physical factors affect the material properties under varying measurement conditions. Similarly, multi-layer electronic devices that contain such graded thin films as one or more of their layers can also be characterized spatially in order to optimize the performance. In this work, we apply these high throughput experimental methods to thin film transistors (TFTs), demonstrating combinatorial channel layer growth, device fabrication, and semi-automated characterization using sputtered oxide TFTs as a case study. We show that both extrinsic and intrinsic types of device gradients can be generated in a TFT library, such as channel thickness and length, channel cation compositions, and oxygen atmosphere during deposition. We also present a semi-automated method to measure the 44 devices fabricated on a 50 mm×50 mm substrate that can help to identify properly functioning TFTs in the library and finish the measurement in a short time. Finally, we propose a fully automated characterization system for similar TFT libraries, which can be coupled with high throughput data analysis. These results demonstrate that high throughput methods can accelerate the investigation of TFTs and other electronic devices.
其他文献
本试验以抗白粉病的中国野生葡萄品种白河-35-1、感白粉病的欧洲葡萄品种佳利酿及其二者的F1抗病株系6-12-4和感病系6-12-2为材料,通过考马斯亮蓝R-250染色和解剖观察统计叶
We show that it is possible to simulate an anyon by a trapped atom which possesses an induced electric dipole moment in the background of electric and magnetic
We investigate the discharge and fl ow characterizations of a double-side siding discharge plasma actuator driven by different polarities of direct current (DC)
Simulation on the degradation of 4H-SiC Schottky detector was carried out using ISE TCAD, and the limit of the drift-diffusion analytical model was discussed. T
设计属于视觉艺术的范畴,“视知觉”研究在其中占有很特殊的意义。大多数形象和信息都是通过视觉获得,艺术家和设计人通过对大自然、社会生活的观察、感受、体验取得了对物象
With the aid of Lenard recursion equations, an integrable hierarchy of nonlinear evolution equations associated with a 2 × 2 matrix spectral problem is propose
We utilized a set of fused silica thin plates to broaden the spectrum of 1 kHz, 30 fs Ti:sapphire amplified laser pulses to an octave. Following the compression
The unconditional security of quantum key distribution (QKD) can be guaranteed by the nature of quantum physics.Compared with the traditional two-dimensional BB
Photoionization time delays have been studied in many streaking experiments in which an attosecond pulse is used to ionize the atomic or solid state target in t
当前,全国省级以上广播电视刊物约有五、六十种,大致可分为两类:一类是面向社会广大听众和观众的,其内容主要是评介广播电视节目,反映听众、观众的意见要求,介绍有关广播电