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采用分子动力学(MD)模拟方法,从原子尺度上研究了离子束辅助沉积(IBAD)类金刚石(DLC)薄膜过程中离子束入射角对薄膜结构的影响.重点讨论了不同的离子束入射角所对应的薄膜表面模型,平均密度和sp3键含量.结果表明,离子束斜入射加强了入射原子的水平动能,从而加强了原子水平迁移;Ar离子斜入射时C原子迁移率均比垂直入射大,薄膜密度和sp3键含量都比垂直入射小.不同的离子束入射角随着到达比和入射能的变化,对薄膜结构的影响不同.离子束斜入射时可以得到不同结构的膜.
Using molecular dynamics (MD) simulation method, the influence of the incident angle of the ion beam on the film structure was studied at the atomic scale from the ion beam assisted deposition (IBAD) diamond-like carbon (DLC) thin films. The average density and the content of sp3 bond in the film are obtained.The results show that the oblique kinetic energy of the ion beam strengthens the horizontal kinetic energy of the incident atom and thus enhances the horizontal migration of atoms.At the oblique incidence of Ar, , The film density and sp3 bond content are smaller than the vertical incidence.Different ion beam incident angle with the arrival ratio and the incident energy changes, the impact on the film structure is different.Ion beam oblique incidence can be obtained by different structures of the film.