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提出并制作了转动竖直微镜的微机械光开关,采用曲线形状的电极设计,有效地减低了悬臂梁驱动器的吸合电压,采用体硅深刻蚀技术结合(110)硅的各向异性腐蚀技术制备了光开关芯片和耦合对准的U形槽和卡簧。芯片经初步封装后进行了电学测试和光学测试,测得吸合电压78.5V,谐振频率2.3kHz,光开关损耗5dB,隔离度45dB。
A micromechanical optical switch for rotating vertical micromirrors is proposed and manufactured. The curve-shaped electrode design is adopted to effectively reduce the pull-in voltage of the cantilever driver. The bulk silicon deep etching technique is combined with (110) silicon anisotropic etching The optical switch chip and the U-shaped slot and the clamp spring are prepared by the technology. After the initial packaging of the chip, the electrical test and optical test were carried out. The pull-in voltage was 78.5V, the resonance frequency was 2.3kHz, the optical switching loss was 5dB, and the isolation was 45dB.