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采用反应磁控溅射法制备了CrN、CrSiN与CrAlN复合薄膜,分析了复合薄膜的微观结构,并考察了3类薄膜的摩擦磨损性能.结果表明:所制备的薄膜晶体结构没有随着Si或Al的加入发生转变,仍然为面心立方结构.CrAlN复合薄膜为合金复合薄膜,其中Al以置换方式固溶于CrN中,取代了一部分Cr原子,形成固溶体;CrSiN复合薄膜为晶态CrN与非晶态Si3N4组成纳米复合结构.复合薄膜结构致密且硬度较CrN大幅提高,在摩擦磨损过程中具有较强的抗形变能力,能够有效阻止裂纹,抗摩擦磨损性能较CrN薄膜均有不同程度的提高.
The CrN, CrSiN and CrAlN composite films were prepared by reactive magnetron sputtering and the microstructures of the films were analyzed. The tribological properties of the three films were also investigated. The results show that the prepared films do not change with the Si Al is added into the transformation, still face to face cubic structure.CrAlN composite film for the alloy composite film, in which Al substitutional solid solution in CrN, replacing part of the Cr atoms to form a solid solution; CrSiN composite film is crystalline CrN and non Crystalline Si3N4 composites nanocomposites.The composite films have a dense structure with a significantly higher hardness than CrN and a strong anti-deformation ability in the process of friction and wear, which can effectively prevent cracks and improve the anti-friction and wear properties compared with CrN films .