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利用晶种生长和溶液处理相结合的方法在气敏元件表面制备出了ZnO纳米火炬阵列薄膜,该方法在低温下进行,对环境友好且能耗低。对制得的薄膜进行XRD表征,结果表明其主要物相为纤锌矿ZnO;并对该薄膜进行FESEM表征,发现该ZnO纳米火炬呈中空形貌,高5μm,外径2μm,壁厚约200 nm,且大小均一、排列有序。这些纳米火炬都是由粒径20 nm左右的更细小的ZnO粒子组装而成。此外还讨论了ZnO纳米火炬结构的可能生长机理。最后对这种ZnO纳米火炬阵列薄膜进行了乙醇的气敏性能测试,并与纳米棒和纳米墙等已知形貌的ZnO纳米材料相比较,结果表明纳米火炬结构的ZnO纳米材料具有更优良的气敏性能。
The ZnO nano-flare array thin film was prepared on the surface of gas sensor by the combination of seed growth and solution treatment. The method was carried out at low temperature and was environmentally friendly and low in energy consumption. The XRD results showed that the main phase was wurtzite ZnO. The FENEM was characterized by FESEM and found that the ZnO nano torch has a hollow morphology with a height of 5μm, an outer diameter of 2μm and a wall thickness of about 200 nm, and the size of uniform, arranged in an orderly manner. These nano-torches are made of finer ZnO particles with a particle size of about 20 nm. In addition, the possible growth mechanism of ZnO nano torch structure is also discussed. Finally, the ZnO nano-torch array films were tested for gas sensitivity of ethanol and compared with ZnO nanomaterials such as nanorods and nanowalls. The results show that nanocrystalline ZnO nanomaterials have better Gas sensing performance.