日本三洋电机公司开发了微机械用的新微细配线技术.用准分子激光和可见光激光同时照射在基板的方法,在世界上首次实现立体配线.该方法被称之为双波长激光化学汽相沉积法,在实验装置上注入钨化合物等原料气体,并且将准分子激光和可见光同时照射在基板上,在30秒内形成直径0.1mm,厚度 Japan’s Sanyo Electric Co., Ltd. has developed a new micromircuit wiring technology for micromachining, which is the world’s first realization of a three-dimensional wiring using a method in which an excimer laser and a visible laser are simultaneously irradiated on a substrate. This method is called a dual-wavelength laser chemical vapor Phase deposition method, a raw material gas such as a tungsten compound is injected into the experimental apparatus, and an excimer laser and a visible light are simultaneously radiated on the substrate to form a film having a diameter of 0.1 mm and a thickness