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本文介绍用半导体硅力敏器件测量小工质流量的方法及装置。这种测量不受工质温度、粘度等状态的影响,可用于太阳能平板和聚光集热器的热性能试验,测量各种介质在不同状态下的流量。
This article describes a method and apparatus for measuring the flow of small solids using silicon-on-silicon devices. This kind of measurement is not affected by the temperature, viscosity and other conditions of the working fluid. It can be used in the thermal performance test of solar panels and concentrating collectors to measure the flow rate of various media in different states.