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对SiO_2/CrO_x/CrN_y/Al型太阳能光谱选择性吸收薄膜的热稳定性进行测试,分析薄膜在高温下的光学性能、表面及截面形貌、元素分布、微观结构等变化。在450℃下热处理300 h后采用SEM、AES、TEM等方法分析薄膜热处理后的微观结构、成分变化。结果表明,经热处理薄膜出现表面粗糙度增加、晶粒异常长大、亚层界面变模糊等变化。主要的衰减机制为薄膜在高温下O、N发生轻微扩散,另外经热处理后吸收层Cr结晶度略有增加。
The thermal stability of SiO_2 / CrO_x / CrN_y / Al solar selective absorption film was tested, and the optical properties, surface and cross section morphology, elemental distribution and microstructure of the film were analyzed. After heat treatment at 450 ℃ for 300 h, the microstructure and composition of the films after heat treatment were analyzed by SEM, AES and TEM. The results show that the surface roughness increases, the grains grow abnormally, and the sublayer interface becomes blurred. The main attenuation mechanism is the slight diffusion of O and N at high temperature of the film. In addition, the Cr crystallinity of the absorption layer slightly increases after heat treatment.