用光激励氟气清洁外延硅表面=SurfacecleaningforSiepitaxyusingphotoexcitedfluorinegas[刊,英]/Aoyama,T,…//J.Electrochem.Soc,-1993,140(2).-366~37...
Excitation of fluorine gas with light to clean the surface of epitaxial silicon = SurfacecleaningforSiepitaxyusingphotoexci