一、引言传统的真空镀膜,全靠人工操作控制。这样的操作控制,会影响光学薄膜的质量和重复性精度。因此薄膜工作者多年来一直在致力于探索能严格控制各项工艺因素的自动化生产装置或系统。理想的自动化控制系统,应具备显示、控制、运算、反馈修正等各种功能。因此使用微处理机作为全套系统中 First, the introduction of the traditional vacuum coating, thanks to manual control. This kind of operation control, will affect the optical film quality and repeatability accuracy. For these reasons thin film workers have been working for years to explore automated production devices or systems that tightly control the various process factors. The ideal automation control system, should have a display, control, computing, feedback correction and other functions. So use the microprocessor as a full system