微纳加工领域是从事物理学研究与应用开发人员,特别是从事纳米材料与器件研究的物理工作者十分关注和重视的领域。这是由于人们在对纳米材料性能的研究中发现,性能与材料的微观结构尺寸的变化关系密切。例如,随着材料尺度的减小,由于表面效应、体积效应和量子尺寸效应的影响,材料的物理性能和采用该材料制作的器件特性等都可能表现出与宏观体相材 Micro-nano processing is engaged in physical research and application developers, especially in the field of nanomaterials and devices of physical workers are very concerned and attention areas. This is because people in the study of the properties of nanomaterials found that the performance and material microstructure and size changes are closely related. For example, as material scales decrease, the physical properties of materials and the device characteristics made using the materials may show a significant effect on the macro-bulk material due to the effects of surface effect, volume effect and quantum size effect