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电容测微器具有结构简单、长期稳定性好、价格低廉、制作方便等优点,但只能应用于位移量很小的测量上.电容测微器存在着量程与精度之间的矛盾:如加大电容器极板之间的距离,精度就不可能做得很高;为了提高精度和灵敏度,就需要缩小电容器极板之间的距离.与激光干涉仪相比较,虽然激光干涉仪在一定范围内不存在距离和精度之间的矛盾,且可以同时做到量程大、精度高,但如要把它的精度提高到十分之一至百分之一的半波长(即1%~1‰微米量级),是较为费事和困难的.另外,激光干涉仪的价格和复杂程度
Capacitance micrometer has the advantages of simple structure, good long-term stability, low price and easy manufacture, but it can only be applied to the measurement with small displacement. There is a conflict between range and accuracy in capacitive micrometer: The distance between the large capacitor plates, the accuracy can not be done very high; in order to improve the accuracy and sensitivity, it is necessary to narrow the distance between the capacitor plates.Compared with the laser interferometer, although the laser interferometer within a certain range There is no conflict between distance and accuracy, and you can do both large-scale and high-precision, but if you want to increase its accuracy to one-tenth to one-half wavelength (ie, 1% to 1 ‰ microns Order of magnitude), is more complicated and difficult.In addition, the price and complexity of the laser interferometer