Deposition of Nano-Scaled Coatings Using Inductively Coupled Plasma

来源 :中国稀土学报：英文版 | 被引量 : 0次 | 上传用户：silkji

【摘要】

：

Nano-scaled Ti-B-N coatings could be produced by inductively coupled plasma (ICP) assisted magnetron spurtering. The properties and microstructure of the coatin

【作者】

：

D H Jung B Park J J Lee

【机构】

：

SchoolofMaterialsScienceandEngineering

【出处】

：

中国稀土学报：英文版

【发表日期】

：

2004年z2期

【关键词】

：

nano-scaled COATINGS industively conpled PLASMA

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Nano-scaled Ti-B-N coatings could be produced by inductively coupled plasma (ICP) assisted magnetron spurtering. The properties and microstructure of the coating can be changed drastically by applying ICP to conventional magnetron sputtering. In this work

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Deposition of Nano-Scaled Coatings Using Inductively Coupled Plasma

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