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利用时域有限差分法对由闭合方环(SCL)和开口谐振环(SRR)组合构成的平面太赫兹谐振器实现的类电磁诱导透明(EIT)效应及其折射率传感器进行了仿真分析。结果表明,该类EIT谐振峰对周围环境介质折射率变化具有很高的灵敏度,且其FOM(Figure of merit)值达到4.06,优于独立SCL或SRR结构传感器的0.09和2.48。利用激光诱导技术与化学镀铜技术在聚酰亚胺薄膜上加工了谐振器样品,并对其进行了透射性能测试,测试结果与仿真计算基本一致。
The electromagnetic induced transparency (EIT) effect of the planar terahertz resonator composed of a closed square ring (SCL) and an open ring resonant ring (SRR) and its refractive index sensor were simulated by finite difference time domain method. The results show that the resonance peaks of these EITs have high sensitivity to the change of the refractive index of the surrounding medium and the figure of merit (FOM) reaches 4.06, which is better than 0.09 and 2.48 of the independent SCL or SRR structure sensors. The resonator samples were processed on the polyimide films by laser induced electroless copper plating and the transmission performance was tested. The test results are in good agreement with the simulation results.