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为解决光谱分析及超光谱成像、医学和军事侦察等系统应用中有序密排光纤变维器(OFDTE)存在的定位精度低的问题,利用单晶硅材料的晶格特点和微机电系统(MEMS)的精确定位技术,提出了制作高精度光纤变维器的光纤平面排布方法。分析了系统误差,研究了光纤排列、固化、研磨抛光及封装工艺,制作了2000根光纤的1×2光纤变维器。测量结果为线列端长度累计误差为0.5μm;局部高度误差小于0.15μm;器件端面表面粗糙度均方根值小于0.9nm;在2000周期范围内,光纤阵列端面纵向位置误差最大值为190.5nm;表面未镀膜的光纤变维器的透射率为51.46%。经过随机振动后,器件的断丝率增加0.1%。通过-40℃～40℃温度循环实验,器件结构及性能未发生变化。
In order to solve the problem of low positioning accuracy of OFDTE in the field of spectral analysis and hyperspectral imaging, medical and military reconnaissance systems, the use of single crystal silicon lattice characteristics and micro-electromechanical systems ( MEMS) precise positioning technology, put forward the production of high-precision fiber optic variable-dimensional fiber plane arrangement method. The systematic errors were analyzed. The fiber alignment, curing, polishing and encapsulation process were studied. A 1 × 2 fiber optic transformer with 2000 fibers was fabricated. The measurement results showed that the cumulative error of the length of the line end was 0.5 μm, the local height error was less than 0.15 μm, the root mean square of the surface roughness of the device was less than 0.9 nm, and the maximum longitudinal position error of the fiber array end surface was 190.5 nm The transmittance of uncoated fiber optic variator was 51.46%. After random vibration, the device’s breaking rate increased by 0.1%. Through -40 ℃ ~ 40 ℃ temperature cycling experiments, the device structure and performance did not change.