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为研究交流信号检测的多壁碳纳米管(MWCNTs)湿度传感器模型,通过扫描电子显微镜对传感器敏感薄膜(MWCNTs-SiO2薄膜)的孔隙结构进行观察,并使用表面积与孔隙(ASAP)分析系统对薄膜孔隙率进行分析.利用Debye方程对敏感薄膜中凝聚出液态水介电损耗的描述建立传感器模型.为了验证该传感器模型,制作了一种基于MWCNTs-SiO2的电导型湿度传感器,在100 kHz测试频率下,对不同相对湿度环境中的传感器电导值进行测试,利用测试结果与所建立模型进行拟合,发现R2大约为0.979,可见该模型可以用来描述传感器湿敏特性.
In order to study the multi-walled carbon nanotube (MWCNTs) humidity sensor model of AC signal detection, the pore structure of sensor-sensitive thin film (MWCNTs-SiO2 thin film) was observed by scanning electron microscope and the surface area and pore (ASAP) Porosity was analyzed.The Debye equation was used to describe the dielectric loss of liquid water condensed in the sensitive film to establish the sensor model.In order to verify the sensor model, a conductivity-based MWCNTs-SiO2 based humidity sensor was fabricated at 100 kHz test frequency Under different relative humidity environment, the sensor conductance value is tested, and the test results are used to fit the established model. It is found that R2 is about 0.979. Therefore, the model can be used to describe the sensor’s moisture sensitivity.