锗低频大功率晶体管烧结工艺中氢-氮保护气体净化系统的改进

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众所周知,锗低频大功率管芯是用合金烧结法,在烧结炉中一次烧结同时形成两个pn结(发射结和集电结).保护气体的纯度直接影响到两个pn结的质量.我们用的保护气体为H_2-N_2混合气体,它是由液氨制氢炉把氨分解而成的.化学反应式如下:2NH_3(?)N_2+3H_2这种保护气体由3份氢和1份氮组成,不存在O_2,使用安全经济,得到了广泛的应用.但这种气体中含有少量的水汽和未分解的氨. As we all know, germanium low-frequency high-power die is the alloy sintering method, sintering in the sintering furnace at the same time forming two pn junction (emitter junction and collector junction.) The purity of the protective gas directly affects the quality of the two pn junction. The protective gas used is H_2-N_2 mixed gas, which is decomposed by ammonia in liquid ammonia hydrogen furnace. The chemical reaction is as follows: 2NH_3 (?) N_2 + 3H_2 This protective gas consists of 3 parts of hydrogen and 1 part of nitrogen Composition, absence of O2, use of safe economy, has been widely used.But this gas contains a small amount of water vapor and undecomposed ammonia.
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