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利用波长为800 nm的飞秒脉冲激光,对表面贴有聚对苯二甲酸乙二醇酯透明膜的单晶硅片进行扫描,研究了不同激光制备参数对微结构形成的影响.结果表明,锥状微结构是否形成取决于激光能量密度,能量密度太小时不能形成锥状结构,能量密度太大时易破坏锥状突起;而激光扫描速度可直接影响锥状微结构的质量,扫描速度太小时也易破坏锥状结构突起,扫描速度太大时,由于作用深度太浅使得锥状结构轮廓不分明.在此基础上对实验参数进行优化,得到了较理想的锥状微结构.最后通过分析指出,贴膜条件下锥状微结构的形成是由激光烧蚀作用和氧化作用共同引起的,且激光烧蚀作用占主导.
The effect of different laser preparation parameters on the microstructure was studied by using the femtosecond pulsed laser with the wavelength of 800 nm to scan the single crystal silicon wafer with the transparent polyethylene terephthalate film attached on the surface. Conical microstructure is formed depends on the laser energy density, the energy density is too small can not form a cone structure, the energy density is too large to easily destroy the cone-shaped protrusions; and laser scanning speed can directly affect the quality of the tapered microstructure, the scanning speed too Hour is also easy to destroy the conical structure of the protuberance, the scanning speed is too large, the role of the depth is too shallow so that the conical structure of the outline is not clear.On the basis of the experimental parameters are optimized to obtain a more ideal conical microstructure. It is pointed out that the formation of the conical microstructure under the film condition is caused by both laser ablation and oxidation, and the laser ablation is dominant.