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一、引言随着科学事业的发展和实验室测量技术,尤其是真空测量技术的要求,弱电流的测量是必不可少的。目前测量小于10~(-15)安的弱电流一般是采用电子管静电计,即以静电计管作为输入级、晶体管、运算放大器或者全用电子管作主放大的静电计放大器,和振簧式静电计。然而,后者由于制作困难,使这种仪器大量生产受到限制,因而在反应时间小于1秒的极高真空测量和质谱技术中,采用以静电计管作为放大器输入级的静电计。为了进一步认识它,本文将对这类常用的静电计灵敏度进行分析。
I. INTRODUCTION With the development of science and laboratory measurement technology, especially the requirements of vacuum measurement technology, the measurement of weak current is indispensable. The current measurement of less than 10 ~ (-15) Ann weak current is generally used tube electrometer, which uses the electrostatic meter as the input stage, transistors, operational amplifiers or full use of electronic tubes for the main amplification of the electrometer amplifier, and spring-loaded electrostatic meter. However, the latter, due to manufacturing difficulties, limited the mass production of such instruments, so electrometers were used as the amplifier input stage in ultra-high vacuum measurement and mass spectrometry with reaction times of less than 1 second. In order to further understand it, this article will analyze the commonly used sensitivity of electrometer.