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红外扫描显微镜最近在工业应用中开辟了红外扫描显微镜的新应用。它原来是研究工作中应用的仪器,但现在被用于半导体器件生产检验工
Infrared scanning microscopy recently opened up new applications for infrared scanning microscopy in industrial applications. It was originally used in research work of the instrument, but now it is used for semiconductor device production inspector