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超精密加工的轮廓精度控制直接影响到工件的加工精度 ,交叉耦合控制算法通过对两轴进行协调而影响轮廓控制精度。文章在分析超精密数控机床误差模型的基础上 ,将变增益交叉耦合控制算法引入超精密数控机床的伺服控制。实验结果表明 :变增益交叉耦合控制算法可以在不改变位置环的情况下 ,有效地提高系统的轮廓精度。
The contour accuracy control of the ultra-precision machining directly affects the machining accuracy of the workpiece. The cross-coupling control algorithm affects the contour control accuracy by coordinating the two axes. Based on the analysis of the error model of the ultra-precision CNC machine tool, the article introduces variable-gain cross-coupling control algorithm into the servo control of ultra-precision CNC machine tool. The experimental results show that the variable-gain cross-coupling control algorithm can effectively improve the contour accuracy of the system without changing the position loop.