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本文讨论了应用于摄制大型、高精度光学码盘的双高斯型光刻投影物镜的设计特点与合理方案。根据使用的特殊要求,本投影物镜设计的主要特点是:在保证给定的象质要求和较大的相对孔径(D/f’=1/2.5)的前提下,较好地实现了全视场照度的均匀一致性,边缘视场的线渐晕系数K_D达到0.85(对应的面渐晕系数Ks达到0.8)。设计中重视了经济性与工艺性,立足于工厂的现有条件。所设计的物镜自投入生产以来,已取得了良好的经济效益
This paper discusses the design features and reasonable solutions of double Gaussian lithography projection objective lens used in the fabrication of large-scale, high-precision optical coders. According to the special requirements of use, the main features of the projection lens design are as follows: under the precondition of ensuring a given image quality and a large relative aperture (D / f ’= 1 / 2.5) The uniformity of the field illumination, the line-of-sight vignetting coefficient K_D of the edge field reaches 0.85 (corresponding to the surface vignetting coefficient Ks of 0.8). The design emphasizes the economy and craftsmanship, based on the existing conditions of the factory. Since the design of the objective lens into production, has achieved good economic returns