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介质/金属/介质(dielectric/metal/dielectric,D/M/D)多层膜既透明又导电且具有柔性,最有可能替代ITO膜,作为透明导电电极,应用于柔性显示、太阳能电池等光电器件。本文介绍D/M/D膜系的起源,分析了透明导电机理,然后,从多层膜制备参数,热处理工艺及纳米银层表面等离激元共振对多层膜光电性能的影响三个方面综述了D/M/D膜系中得到广泛研究的二氧化钛/银/二氧化钛多层膜的最新研究进展,并展望了D/M/D透明导电薄膜的研究方向。
The dielectric / metal / dielectric (D / M / D) multilayer film is both transparent and conductive and flexible, most likely to replace the ITO film as a transparent conductive electrode for flexible displays, solar cells and other photovoltaic Device. In this paper, the origin of D / M / D film system is introduced and the mechanism of transparent conductivity is analyzed. Then, from the aspects of multi-layer film preparation parameters, heat treatment process and surface plasmon resonance of nano-silver layer on the photoelectric properties of multilayer films In this paper, the latest research progress of Ti / Ag / D multilayers widely studied in D / M / D films is reviewed. The research direction of D / M / D transparent conductive films is also discussed.