微机电系统 (MEMS)器件及系统仿真正日益受到MEMS研究者的重视。其仿真内容涉及力学、电子学、热学、光学、流体学等许多学科。MEMS和其他微系统可看作为一个多域物理系统。本文从方法学观点讨论了建模方法、计算机辅助模拟工具、多域模型库以及不同仿真器的耦合问题。将电网络概念引入到不同域系统仿真中以及等效电路被应用到不同的物理域系统。对于系统模拟和仿真来说 ,元件模型库的建立非常重要 ,引入多端口元件 ,并用线性和非线性微分方程加以描述。另外 ,本文也简单分析了系统仿真中涉及的降阶问题、模型优化方法以及相关的仿真工具和仿真器间的耦合问题。 Microelectromechanical systems (MEMS) devices and system simulation are increasingly valued by MEMS researchers. The simulation involves mechanics, electronics, thermal, optics, fluid science and many other disciplines. MEMS and other microsystems can be considered as a multi-domain physical system. This paper discusses the modeling methods, computer-aided simulation tools, multi-domain model libraries and the coupling problems of different simulators from a methodological point of view. The concept of electrical networks is introduced into different domain system simulations and equivalent circuits are applied to different physical domain systems. For system simulation and simulation, the establishment of component model library is very important. Multi-port components are introduced and described by linear and nonlinear differential equations. In addition, this paper also briefly analyzes the problems of reduced order, model optimization and related coupling between simulation tools and simulators involved in system simulation.