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提出、设计并采用激光直写和反应离子刻蚀技术制作出一种新型的衍射光学纯相位型二维激光扫描器，并进行了系统参数的实验测试，其扫描角度为２５°×２５°，衍射效率为４１％。
A new type of pure 2D phase laser scanner with diffractive optical purity was designed and designed by laser direct writing and reactive ion etching. The system parameters were tested experimentally. The scanning angle was 25 ° × 25 °, The diffraction efficiency is 41%.