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分析了倾斜入射条件下导致光学薄膜产生偏振的原因,针对不同偏振态的等效导纳与等效相位进行了分析,并计算了对称膜层在45°入射条件下不同偏振态的等效折射率与等效相位厚度,采用等效层方法设计了光学性能良好的600～900 nm波段消偏振宽带减反膜。最后利用电子束蒸发技术制备了薄膜样品,样品的光谱性能完全能够满足使用要求。其中在600～900 nm波段范围内,平均反射率均小于1．38%,反射率的偏振度均低于0．89%。另外,通过对其理论及实验光学性能、角度敏感性、膜层厚度误差敏感性等方面的分析结果可知,对称膜层组合法是设计消除倾斜入射下宽带减反膜偏振效应的一种行之有效的方法。
The reasons for the polarization of the optical thin film under oblique incident conditions are analyzed. The equivalent admittance and equivalent phase of different polarization states are analyzed. The equivalent refraction of symmetric film under different polarization states at 45 ° is calculated. Rate and equivalent phase thickness, an effective optical anti-polarization wideband anti-reflection film with 600-900 nm band was designed by the equivalent layer method. Finally, the electron beam evaporation technique was used to prepare the thin film samples. The spectral properties of the samples can fully meet the requirements. The average reflectance was less than 1.38% and the reflectance was less than 0.89% in the range of 600-900 nm. In addition, through the analysis of its theoretical and experimental optical properties, angular sensitivity, sensitivity of the film thickness error sensitivity, etc., the symmetric film combination method is designed to eliminate the polarization effect of broadband antireflection film under oblique incidence effective method.