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结合时域和频域干涉图分析方法,提出一种任意相移阴影叠栅条纹图相位解调技术,降低了干涉图在采样过程中对相移量的严格标定要求,补偿了相移阴影叠栅技术固有的相移不匀误差。使用空域技术确定采样干涉图的正交信号,进而得到了采样干涉图的相移量,然后运用任意相移相位提取算法搜索测量相位信息。实验证明此方法简单方便、求解迅速,且优于典型的相移算法,其测量误差的标准差不超过3×10-3 mm,该方法为提高相移阴影叠栅技术的测量精度提供了有效手段。
Combined with the analysis methods of time domain and frequency domain interferogram, an arbitrary phase shift shaded moire fringe pattern phase demodulation technique is proposed, which reduces the strict calibration requirements for the phase shift amount of the interferogram in the sampling process and compensates the phase shift shadow stack Inherent gate shift error in phase shift. Airspace techniques are used to determine the quadrature signals of the sampled interferograms, and the phase shift of the sampled interferograms is obtained. Then the phase-shifted phase extraction algorithm is used to search the measured phase information. The experimental results show that the proposed method is simple, convenient and fast to solve, and is superior to the typical phase shift algorithm. The standard error of measurement error is less than 3 × 10-3 mm. This method provides an effective method to improve the measurement accuracy of phase-shift shadow mask technology means.