随着新型材料的研制以及微电子学技术的发展，迫切需要建立纳米量级深度分辨的分析技术。用弹性反冲探测技术（ＥＲＤ）分析材料中成分的深度分布虽然在国外已经广泛地采用，但在国内还仅限于用简单半导体探测器，因而分析的样品有限，深度分辨也达不到要求。ＥＲＤ方法可以同 With the development of new materials and the development of microelectronics, there is an urgent need to establish a nano-scale deep-resolution analysis technology. Although the depth distribution of the material analyzed by ERD has been widely used in foreign countries, it is still limited to the use of simple semiconductor detectors in China. Therefore, the samples analyzed are limited and the depth resolution can not meet the requirements. ERD method can be the same