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非球面的非零位法检测高效快速,并可实现较高精度的通用化检测。介绍了一种可用于非球面非零位检测中降低检测光波前斜率的部分零位透镜。该透镜具有较大的球差,可以显著补偿被测非球面的纵向法线像差,使得返回的检测光波前能够被探测器分辨。论述了部分零位透镜的设计过程,特别是约束控制条件以及初始结构的选取原则,并就相对口径为f/2和f/1.5的两个抛物面给出了设计实例。设计结果表明:该部分零位透镜可以对一定口径和相对口径范围内的非球面实现部分零位补偿。利用一系列部分零位镜将可以对较大范围内的非球面进行补偿,从而实现常见非球面的通用化检测。该研究对非球面的通用化检测具有重要意义。
Non-zero aspheric non-standard detection method is fast and efficient, and can achieve high-precision universal testing. A partial zero lens which can be used to reduce the slope of the detection light wavefront in non-zero aspheric detection is introduced. The lens has a larger spherical aberration, which can significantly compensate the longitudinal normal aberration of the aspheric surface under test so that the returned detection light wavefront can be resolved by the detector. The design process of some zero lenses is discussed, especially the constraint control conditions and the principle of selecting the initial structure. The design examples of two parabolas with relative aperture of f / 2 and f / 1.5 are given. The design results show that this part of the zero lens can compensate partial zero for the aspheric surface within a certain diameter and relative aperture. The use of a series of partial mirrors will allow the compensation of a wide range of aspheric surfaces, enabling the common detection of common aspheric surfaces. This research is of great importance to the universal testing of aspheric surfaces.