通常,为了提高耐压,光控晶闸管普遍采用台面结构,管芯的正、反两面都形成台面。这样,正、反两个方向的p-n结全都暴露了出来,因此都必须进行台面保护。在这种台面结构中,做好台面和如何保护好台面是关键。当台面沟道加深时,流片过程中硅片容易碎裂,因此, In general, in order to improve the withstand voltage, the light-controlled thyristor generally adopts a mesa structure, and the mesa is formed on both the front and the back of the die. In this way, the positive and negative p-n junction in all directions are exposed, so must be protected by the table. In this kind of countertop structure, it is the key to make countertops and how to protect the countertops. When the mesa trench deepens, the silicon chip is easily broken during the process of the chip flow. Therefore,