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利用X射线光电子能谱(XPS)技术进行了Fe-Ni合金薄膜组成的准确测量研究,考察了3种不同来源的相对灵敏度因子对同一测试样品测量结果的影响。试验结果表明:通过纯Fe和纯Ni薄膜测得、仪器软件自带、Fe-Ni合金薄膜标准物质测得的相对灵敏度因子计算得到的Fe-Ni合金薄膜组成(Fe的摩尔分数)分别为43.23%,47.39%和49.91%。通过Fe-Ni合金薄膜标准物质(与测试样品具有相似组成)测得的相对灵敏度因子来计算测试样品的元素组成时,可以获得更加准确、有效的测量结果(Fe的摩尔分数为49.91%),这与国际关键比对CCQM-K67参考值(50.02%)相一致;测量结果不确定度优于3%。此外,通过氩离子刻蚀技术能够很好地去除样品表面含碳污染物和金属氧化物。
The X-ray photoelectron spectroscopy (XPS) was used to measure the composition of Fe-Ni alloy thin films. The influence of relative sensitivity factors of three different sources on the measurement results of the same test sample was investigated. The experimental results show that the composition of the Fe-Ni alloy films (the molar fraction of Fe) calculated by the relative sensitivity factors measured by the instrument software and by the standard materials of Fe-Ni alloy thin films measured by pure Fe and pure Ni films are respectively 43.23 %, 47.39% and 49.91% respectively. The calculation of the elemental composition of the test sample by the relative sensitivity factor of the Fe-Ni alloy thin film reference material (having a similar composition to that of the test sample) gives more accurate and effective measurement results (the molar fraction of Fe is 49.91%), This is consistent with the international comparison of the CCQM-K67 reference value (50.02%); the uncertainty of the measurement results is better than 3%. In addition, the carbonaceous contaminants and metal oxides on the sample surface can be well removed by argon ion etching.