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A doubly clamped microbeam actuated by electrostatic force with squeezed gas film damping is a well-known and stan-dard micro-device in microelectromechanical system (MEMS) for many researchers to demonstrate how reduced-order dynamic macromod-el is an effective way to faithfully capture the device behaviors. However it still takes time to directly recompute the time-dependant nonlin-ear terms in macromodels which are generated by a proper orthogonal decornposition (POD) method with Galerkin procedure at every timestep during the macromodel simulation. This paper proposes two methods for speeding up the computation of macromodel simulations. Inthe first method, the computation speedup is achieved based on the concept of precomputation upon the basis functions are available. In thesecond method, cubic splines approximation is used to interpolate the basis functions and their first and second derivatives, and spatial inte-gration is performed by application of the Gaussian quadrature. Numerical results sh
A doubly clamped microbeam actuated by electrostatic force with squeezed gas film damping is well-known and stan-dard micro-device in microelectromechanical system (MEMS) for many researchers to demonstrate how reduced-order dynamic macromolecule-el is an effective way to faithfully capture the device behaviors. However it still takes time to directly recompute the time-dependent nonlin-ear terms in macromodels which are generated by a proper orthogonal decornposition (POD) method with Galerkin procedure at every timestep during the macromodel simulation. This paper proposes two methods for speeding up the computation of macromodel simulations. Inthe first method, the computation speedup is achieved based on the concept of precomputation upon the basis functions are available. In thesecond method, cubic splines approximation is used to interpolate the basis functions and their first and second derivatives, and spatial inte-gration is performed by application of the Gaussian quadrature. Nu merical results sh