碳氢化合物污染影响到大多数与真空有关的科学仪器的性能。在电子显微镜里,由于样品受到返流泵液和系统的其他碳氢化合物的聚合作用而污染,使得分辨能力很差。在表面分析设备(例如XPS, AES和 UPS)中,碳氢化合物污染会干扰分析工作。在质谱计里,它能有害地影响分辨能力,使结果的 Hydrocarbon contamination affects the performance of most vacuum-related scientific instruments. In electron microscopy, resolution is poor due to contamination of the sample with the reflux of pump fluid and other hydrocarbon compounds in the system. In surface analysis equipment (such as XPS, AES, and UPS), hydrocarbon contamination can interfere with analytical work. In a mass spectrometer, it can detrimentally affect the resolution of the result