扫频光源OCT对单晶硅片制绒质量的检测

来源 :激光与光电子学进展 | 被引量 : 5次 | 上传用户:Tongtong07
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光学相干层析(OCT)是一种新型的光学信号获取与处理方式,它可以对光学散射介质进行扫描,获得的三维图像,分辨率可以达到微米级。尝试利用扫频光源OCT对在相同的制绒溶液配比下,不同制绒时间的单晶硅片进行检测,通过处理三维图像数据,判断制绒质量,为单晶硅制绒检测提供一种新方法。
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