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介绍的分析方法是测定含有H_2或Ar的PH_3、AsH_3或SiH_4混合气中的痕量O_2、N_2、CO、CO_2和C_1～C_4的碳氢化合物。此法用化学法除去PH_3、AsH_3或SiH_4,然后用气相色谱分离,在低温下用13X分子筛富集痕最成份,再用TCD和FID检测。检测极限值估计O_2和N_2为0.5vpm;CO和CO_2为0.1vpm,碳氢化合物为0.01vpm。用同一个扑集柱进行吸附富集与解吸分离,可在同一个流程中,对所有感兴趣的痕量杂质进行分析。测量结果总的相对标准误差,估计在±22％左右。
The method of analysis described is to determine traces of O_2, N_2, CO, CO_2 and C_1-C_4 hydrocarbons in mixtures of H 2 or Ar with PH_3, AsH_3 or SiH_4. This method is chemically removed PH_3, AsH_3 or SiH_4, and then separated by gas chromatography, 13X molecular sieve enriched traces of the most components at low temperatures, and then TCD and FID detection. The limit of detection was estimated at 0.5 vpm for O_2 and N_2; 0.1 vpm for CO and CO_2 and 0.01 vpm for hydrocarbon. With the same collection column adsorption enrichment and desorption separation, in the same process, all the trace impurities of interest for analysis. The relative standard error of the measurement results is estimated at ± 22%.