论文部分内容阅读
提出一种非线性自适应数字滤波器对通过移相干涉术得到的原理相位图进行去噪音处理。这种数字滤波器的窗口尺寸可以根据其在相位图中的不同位置而变化。在有噪音 (尤其是靠近 2π相位跳变处的噪音 )存在的情况下 ,相位连续化过程仍可以有效地进行以重建被测物体表面形貌的真实相位图。详细介绍了这一技术的原理及实验结果
A non-linear adaptive digital filter is proposed to denoise the principle phase diagram obtained by phase-shift interferometry. The window size of such a digital filter can vary depending on its position in the phase diagram. In the presence of noise (especially noise near 2π phase jumps), the phase continuation process can still be effectively performed to reconstruct the true phase map of the surface topography of the measured object. Details of the principle of this technology and experimental results