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气体微流量标准是校准气体微流量的一种装置，可用于传递型和应用型参考漏孔及气体微流量计的校准。它由恒压式微流量计、流量校准系统、待校流量引入系统和测量与控制系统四部分组成。恒压式微流量计的变容室采用了活塞液压驱动波纹管结构，活塞的平动由恒力矩测速电机驱动导轨平动机构完成，活塞的位移用精密光栅尺测量。在流量测量过程中，测量与控制系统将变容室和参考室之间的压力差控制在工作压力值的0．01％之内。该标准装置可采用直接测量法和比较测量法对气体微流量进行校准，其量程为1．71～1．22×10－5PaL／S，不确定度＜2％。
Gas Microflow Standard is a device that calibrates the gas microfluidic for calibrations of transfer and application reference leaks and gas microflow meters. It consists of constant pressure type micro-flowmeter, flow calibration system, to be school flow measurement system and measurement and control system composed of four parts. Constant pressure micro-flowmeter chamber with a piston hydraulic drive bellows structure, piston translation by the constant torque motor driven rail translation mechanism to complete the displacement of the piston with a precision grating ruler measurement. During flow measurement, the measurement and control system controls the pressure difference between the varactor chamber and the reference chamber to within 0.01% of the working pressure. The standard device can use the direct measurement and comparative measurement of gas microfluidic calibration, the range of 1.71 ~ 1.22 × 10-5PaL / S, the uncertainty of <2%.