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本文从物理光学的部分相干光的干涉和衍射理论出发,对非相干光源成象的复相干度进行计算,得出在照明系统的出瞳上产生相干照明和非相干照明的条件。然后计算出相干照明、非相干照明以及部分相干照明时,显微镜象平面的强度I(P′)。通过对不同的m值的I(P′)计算,得出减少衍射效应的最佳结构参数,即:m=0.75时,象的边缘强度变化最小,分辨率最高,从而扩大显微镜的景深。这个分析结果已经得到实际验证。
Based on the theory of interference and diffraction of partially coherent light in physical optics, this paper calculates the complex degree of coherence of incoherent light source imaging and obtains the conditions of coherent illumination and incoherent illumination on the exit pupil of illumination system. The intensity I (P ’) of the microscope image plane is then calculated for coherent illumination, incoherent illumination, and partially coherent illumination. By calculating I (P ’) for different m values, the optimal structural parameters for reducing the diffraction effect are obtained. For example, when m = 0.75, the edge intensity of the image has the smallest change and the highest resolution, thereby expanding the depth of field of the microscope. The results of this analysis have been validated.