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一、引言离子注入曾因在半导体产业中的巨大成功而名噪于世,但将此技术移植于一般材料(非半导体)的表面改性时却显得步履艰难。尽管早在10年前,人们已经宣称离子注入使某些材料的耐磨损性提高了3～5倍,也使抗腐性能大为改观。但将实验研究的成果真正推广应用并转化为生产力者尚属少见。诚然,离子注入技术有许多独特的优
I. INTRODUCTION Ion implantation has gained a reputation for its immense success in the semiconductor industry. However, it seems difficult to transplant this technology to the surface modification of common materials (non-semiconductors). Although as early as 10 years ago, it has been claimed that ion implantation improved the wear resistance of some materials by a factor of 3 to 5 and greatly improved the corrosion resistance. However, it is still rare for the fruits of experimental research to be truly applied and transformed into productive forces. Admittedly, ion implantation technology has many unique advantages