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氧化锌材料具有优异的光电特性,易于掺杂,近年来一直是半导体材料领域关注的热点。稀土元素钇掺杂氧化锌(YZO)薄膜属于新兴的研究方向,相关研究还处于初级阶段。评述了国内外关于YZO薄膜的最新研究进展。分析比较了该薄膜材料的主要制备方法,包括溶胶-凝胶、共沉淀、磁控溅射、电化学沉积等。着重介绍了目前YZO薄膜的主要研究成果,分析结果表明适当浓度的Y掺杂,能够改善氧化锌的晶格结构,增强紫外辐射强度,提高可见光透过率,降低电阻率。探讨了YZO透明导电薄膜在短波长发光、平板显示、太阳电池等光电器件领域的应用前景。
Zinc oxide material has excellent photoelectric properties, easy doping, in recent years has been the focus of attention in the field of semiconductor materials. Yttrium-doped rare earth elements doped zinc oxide (YZO) film belongs to the emerging research direction, the relevant research is still in its infancy. The recent research progress on YZO thin films at home and abroad is reviewed. The main preparation methods of the thin film materials were analyzed and compared, including sol-gel, coprecipitation, magnetron sputtering and electrochemical deposition. The main research results of YZO films are introduced emphatically. The results show that Y doping at the proper concentration can improve the crystal structure of ZnO, enhance the intensity of UV radiation, increase the visible light transmittance and decrease the resistivity. The application prospects of YZO transparent conductive film in the field of short wavelength luminescence, flat panel display, solar cell and other photovoltaic devices are discussed.